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S7: Production Quality Ferroelectric Thin Films and Devices


EMA 2013


This symposium is targeted at bringing together the industrial leaders in the area of ferroelectric thin film processing. Targeted application areas include ferroelectric random access memory, inkjet printing, sensors, and other MEMS applications. Topics for discussion include all types of thin film manufacturing techniques, repeatability and reproducibility at the manufacturing scale, uniformity controls, contamination controls, defect density, electrical characterization, device design, device characterization.


Proposed Symposium Topics

  • Ferroelectric and Piezoelectric Thin Film Deposition
  • Electrical and Electromechanical Testing and Characterization
  • Reliability and Repeatability Assessment
  • Etching and Patterning
  • Device Fabrication and Processing


Symposium Organizers

  • Ronald G. Polcawich US Army Research Laboratory, USA
  • Glen Fox, Fox Materials Consulting, USA
  • Geoff Brennecka, Sandia National Laboratories, USA


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