NIST has developed a method to measure the toughness (i.e., resistance to fracture) of low-k insulating films found in high-performance ICs. As with other NIST efforts, the technique is aimed…
Read MoreNIST has developed a method to measure the toughness (i.e., resistance to fracture) of low-k insulating films found in high-performance ICs. As with other NIST efforts, the technique is aimed…
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