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S4: Functional Thin Films: Processing and Integration Science


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This symposium will bring together researchers from academia, government laboratories, and industry to focus on the profound role of processing and integration science on structure-property relations and widespread utilization of functional thin films. Topics of interest for this symposium include: advances in thin film synthesis that enable integration with industrially relevant and scalable substrates and process flows; deposition methods that facilitate epitaxy, strain engineering, and integration on a large scale; and novel developments in processing science that achieve bulk-like and/or enhanced responses in thin film systems. The relevant materials systems include ferroelectrics, piezoelectrics, multiferroics, intercalation structures, transparent conducting oxides, optical materials, phase change materials, and other electrically functional materials. The spectrum of materials systems considered is intentionally broad in an effort to bridge the functional electronic materials communities (e.g. piezoelectrics, batteries, memories, etc.) with the vacuum science, semiconductor processing, and integration industry for highest impact and knowledge sharing. Topics of interest include (but are not limited to) integration of oxides with flexible substrates for embedded and conformal applications, advanced substrate preparation methods, optimized and novel synthesis routes to enhance thin film structure, morphology, and properties, achieving and surpassing bulk properties in thin films, and advanced characterization methods that can guide material synthesis.


Proposed Session Topics

  • Deposition engineering for enhanced performance
  • Controlling thin film growth morphology (within the structure zone model)
  • Controlling phase distribution in thin films
  • Preparing thin films containing volatile species
  • Integration challenges for functional devices, low temperature processing, and novel substrates
  • Integrating functional oxides with compound semiconductors
  • Thin film memory and piezoelectric materials
  • Advanced thin film characterization to guide materials synthesis

Session Organizers

  • Brady Gibbons, Oregon State University, USA
  • Jon Ihlefeld, Sandia National Laboratories, USA
  • Ron Polcawich, Army Research Laboratory, USA
  • Jon-Paul Maria, North Carolina State University, USA

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