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Focused Ion Beams (FIB) and Secondary Ion Mass Spectrometry (SIMS)

October 11, 2012

Thursday 8:30 a.m. to 5:30 p.m.

Instructor: Fred Stevie, North Carolina State University

Location: Pittsburgh, Pa., in conjunction with MS&T’12

Register for Fundamentals of Glass today!


ACerS Member – $525

Register for Fundamentals of Glass today!


Student – $195

Register for Fundamentals of Glass today!


Nonmember – $595

Register for Fundamentals of Glass today!


Course plus Membership – $645

Engineers, scientist and students interested in learning more about these two major materials analysis techniques should attend. Some experience with analytical techniques would be useful.

Course Description

The course begins with a discussion of the components of a FIB system including the liquid metal ion source. The interaction of ions with matter is presented and the ion beam assisted chemical vapor deposition process and the gas source method used to improve etch rate are explained. Current FIB instrumentation, including FIB-SEM combination instruments, is described. Applications discussed include: imaging (including grain size measurements), micro-machining, integrated circuit modification, and preparation for analysis by other techniques such as Scanning Electron Microscopy (SEM), Transmission Electron microscopy (TEM), Auger Electron Spectroscopy (AES) and Energy Dispersive X-Ray Fluorescence (EDS). SIMS is compared with other commonly used analytical techniques (AES, XPS, RBS, and TEM). The SIMS process (sputtering, sputtering yield, secondary ion yield, secondary ion energy distribution, and information depth) is discussed. The instrumentation commonly used is presented. The ion source, ion optics, mass analyzer, detector, and vacuum system are described with emphasis on the advantages and disadvantages of various approaches to mass separation (magnetic sector, quadrupole, and time-of-flight analyzers). Examples of the various types of SIMS data (mass spectra, ion images, depth profiles, and line scans) are given along with methods of quantification.

Learning Outcomes

Attendees will become familiar with the principles of these two major materials analysis analytical techniques and learn the capabilities of current instrumentation and the principal applications. Applications for ceramics will be discussed but the main goal is to provide an understanding of the two techniques.

Instructor Biography

<p>Fred Stevie</p>

Stevie is a senior researcher at NC State University, responsible for SIMS and XPS Laboratories in Analytical Instrumentation Facility, research projects in GaN, Nb, and Si based materials, and training of students. He has over 35 years experience in materials characterization, particularly using secondary ion mass spectrometry (SIMS) and focused ion beam (FIB) techniques. He has published extensively in the field of materials characterization, including author or co-author of over 200 professional publications and more than 200 presentations with invited talks at national and international meetings. He provided a scientific testimony in 1992 before a U.S. Senate subcommittee.Stevie earned his BS in Physics from Thomas More College (1968) and his MS from Vanderbilt University (1970).



Cancellation Policy

ACerS reserves the right to cancel a course up to 4 weeks before the scheduled presentation date. Please contact ACerS customer service at 1-866-721-3322 or 1-240-646-7054 to confirm that the course is happening before purchasing your airline tickets. ACerS is not responsible for the purchase of non-refundable airline tickets or the cancellation/change fees associated with canceling a flight.



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