Young-Wook Kim

Dr. Young-Wook Kim is senior vice president of WORLDEX Industry & Trading Co., Ltd. and professor emeritus at the University of Seoul, South Korea. He received his Ph.D. in materials science & engineering from the Korea Advanced Institute of Science and Technology. Before joining WORLDEX Industry & Trading Co., Ltd., he worked as a professor at the University of Seoul and as a senior research scientist at the Korea Institute of Science and Technology. His research focuses on the microstructure control, and mechanical, thermal, and electrical properties of SiC ceramics, and the development of new semiconductor processing parts. Dr. Kim has authored or co-authored more than 350 journal articles and holds about 60 issued patents. He is an academician of the World Academy of Ceramics, a fellow of the American Ceramic Society (ACerS), and an honorary fellow of the European Ceramic Society (ECerS). He received the Edward Orton Jr. Memorial Lecture Award, John Jeppson Award, Samuel Geijsbeek PACRIM International Award, and Global Ambassador Award from ACerS, the Richard Brook Award from ECerS, the Late Shri H.M.S. Chhatwal Memorial Award from the Indian Ceramic Society, and the Academic Award from the Korean Ceramic Society. Dr. Kim is a founding member of the ACerS Korea Chapter and has actively contributed to the professional community by having served as Editor-in-Chief for the International Journal of Applied Ceramic Technology and the Journal of Asian Ceramic Societies. Furthermore, he holds key leadership roles within the Engineering Ceramics Division of ACerS and serves on the advisory boards of ECerS and the World Academy of Ceramics.

Abstract Title: Tailoring SiC Ceramics for Advanced Semiconductor Processing: From Property Optimization to Practical Applications

As next-generation semiconductor manufacturing advances toward nanometer-scale miniaturization and high-density 3D vertical integration, the industry faces severe challenges in plasma etching environments. This technological shift demands high-performance consumable components with extended service lives to maximize fab productivity and reduce overall cost of ownership (CoO). Silicon carbide (SiC) parts have emerged as critical enablers, but they require stringent, application-specific optimization of high purity, thermal stability, electrical conductivity, and mechanical durability. This lecture explores the core material engineering factors that govern these critical properties, translating fundamental science into scalable manufacturing solutions. To demonstrate commercial viability, we present successful case studies of advanced SiC components optimized for high-volume manufacturing (HVM). These include high-uniformity disks and rings for rapid thermal processing (RTP), high-precision pick-up tools, and resistivity-tuned reaction-bonded SiC (RB-SiC) focus rings. Attendees will gain actionable insights into how tailored SiC ceramics overcome current processing bottlenecks and drive the next wave of semiconductor equipment innovation.